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| 홈>제품정보>반도체분야 |
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| 구 분 |
E620 |
E620-MK3 |
| 기판 사이즈 |
3 to 8 inch |
6 to 8 inch |
| Residence time |
0.0414 s |
0.013 s |
| Source |
MSC Type ICP / RIE |
MSC Type ICP |
| 용 도 |
WSi, Poly-Si, Si, Silicide, S trench,
SiO2, SiN, GaAs 등 |
Pt, Ir, Ru, Au, Y1, PZT, SBT, GaAs등 |
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