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| 홈>제품정보>반도체 분야 |
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| 구 분 |
E620 R & D |
| 기판 사이즈 |
3 to 8 inch |
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MSC Type ICP/RIE |
| 용 도 |
AL, Ti, TiN, WSi, Poly-Si, Si, W, SiO2, SiN, GaAs, InP,
GaN, Pt, Au, SBT, PZT, STO, Ni, NiFe, NiCo, Ag, SiO2등 |
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