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| 홈>제품정보>반도체분야 |
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| 구 분 |
E620 R & D |
| 기판 사이즈 |
3 to 8 inch |
| Residence time |
0.0414 s |
| Source |
MSC Type ICP/RIE |
| 용 도 |
TiN, Al-Si-Cu, TiN, Ti, Al, Al-Cu |
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