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Molel |
UA3P-500H |
UA3P-550H |
ÃøÁ¤ ¹üÀ§(X, Y, Z-Ãà) |
200 ¥¹ 200 ¥¹ 45 mm |
1)200 ¥¹ 200 ¥¹ 45 mm
2) 260 ¥¹ 90 ¥¹ 45 mm
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º»Ã¼ ¿ÜÇü Å©±â |
W1,200 ¥¹ D1,346 ¥¹ H1,550 mm |
½ºÄÉÀÏ |
He-Ne Frequency stabilized Laser(He-NeÁÖÆļö ¾ÈÁ¤ ·¹ÀÌÀú) |
ÇÁ·Îºê |
Atomic force probe
Ruby Tip curvature radius 0.5 §®
Diamond : Tip curvature radius 2 §
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ÃÖ´ë ÃøÁ¤ °¢µµ |
75¡Æ |
ÇÁ·Îºê ÃøÁ¤ Á¤µµ |
Ruby stylus
Surface inclined angle
Up to 30¡Æ 0.01 ~ 0.05 §
Up to 45¡Æ ~ 0.08 §
Up to 60¡Æ ~ 0.1 §
Up to 70¡Æ ~ 0.15 §(downward)
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Standard diamond stylus
Surface inclined angle
Up to 30¡Æ up to 0.1 § : Actual value(Not guaranteed value)
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ÃøÁ¤ ¼Óµµ |
0.01 to 20 §®/s |
±âº» ¼ÒÇÁÆ®¿þ¾î |
ÀÚµ¿ NC »ý¼º, ÀÚµ¿ ¾ó¶óÀθÕÆ®(ÇÁ·Îºê R ±³Á¤ Æ÷ÇÔ), µ¥ÀÌÅÍ ÆíÁý, ÀÚµ¿ ¼¾Å͸µ, ÀÚµ¿ °¢µµ º¸Á¤, ÃøÁ¤ ¸ð´ÏÅ͸µ, 3-D Ä®¶ó ±×·¡ÇÈ, Á¶µµ ÃøÁ¤ ±â´É, ÃøÁ¤ ¿øÁ¡ ±â´É, Æ÷ÀÎÆ® µ¥ÀÌÅÍ Ãâ·Â, ±âŸ |
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