| Molel |
UA3P-650H |
UA3P-700H |
| Meaurement range(X,Y,Z-axis) |
1) 400 × 400 × 120mm
2) Φ500 × 120mm
|
500 × 500 × 120mm |
| Scale |
He-Ne Frequency stavilized Laser |
| Probe |
Atomic force probe
Ruby : Tip curvature radius 0.5mm
Diamond : Tip curvature radius 2μm
|
| Maximum mreasurable angle |
75° |
| Probe measurement accuracy |
|
Ruby stylus
Surface incline angle |
Up to 30° |
0.01 ~ 0.05μm |
| Up to 45° |
~ 0.08μm |
| Up to 60° |
~ 0.1μm |
| Up to 70° |
~ 0.15μm (downward) |
Standard diamond stylus
Surface incline angle |
Up to 30° |
0.1μm
※ Actual value(Not guaranteed value)
|
| Measuring speed (Valiable in multiple steps) |
0.01 ~ 20mm/s |
| Basic software |
Automatic NC creation, auto alignment(indulging correction of probe radius). data edit, auto centering, auto inclination correction, in-measurement monitoring, 3-D color graph, roughness measurement, measurement origin operation, dot array data output.
|
* UA3P-650H can measure both 1) and 2) area.
