Main body outer dimensions(mm)
(W x H x D) |
700 Ⅹ 780 Ⅹ 1500 (mm) |
1000 Ⅹ 1100 Ⅹ 1400 (mm) |
1200 Ⅹ1345 Ⅹ 1550 (mm) |
Measurement range
(X, Y, Z-axis) |
30 Ⅹ 30 Ⅹ 20 mm |
100 Ⅹ100 Ⅹ 350 mm |
200 Ⅹ 200 Ⅹ 45 mm |
| Scale |
He-Ne Frequency stabilized Laser |
| Probe |
Atomic force probe
Ruby Tip curvature radius 0.5 ㎜
Diamond : Tip curvature radius 2 ㎛
|
| Maximum measurement angle |
75° |
60° |
| Probe Measurement accuracy |
Ruby stylus
Surface inclined angle
Up to 30° 0.01 ~ 0.05 ㎛
Up to 45° ~ 0.08 ㎛
Up to 60° ~ 0.15 ㎛
Up to 70° ~ 0.15 ㎛
(downward)
|
Ruby stylus
Surface inclined angle
Up to 30° 0.01 ~ 0.05 ㎛
Up to 45° ~ 0.1 ㎛
Up to 60° ~ 0.3 ㎛
|
Standard diamond stylus
Surface inclined angle
Up to 30° up to 0.1 ㎛ : Actual value(Not guaranteed value)
|
| Measurement error of coordinates |
Up to 100 ㎜ : Within 0.05 ㎛(Repeatabilty : Within 0.05 ㎛)
Up to 200 ㎜ : Within 0.1 ㎛(Repeatabilty : Within 0.05 ㎛)
|
| Measurement speed |
0.005 to 5 ㎜/s
variable in multiple steps
|
0.01 to 10 ㎜/s
variable in multiple steps
|
| Basic software |
Automatic NC creation, Auto alignment(including correction probe radius), Data edit, Auto centering, Realtime monitoring in measurement, 3-D color graph, Risarju shape of waves display function |
