| Molel |
UA3P-400T |
| Measurement range |
Top surface measurement 100(X) Ⅹ 100(Y) Ⅹ 50(Z) mm
Side surface measurement 100 Ⅹ 100 Ⅹ 50 mm
Top and Side surface measurement Ø50(XY) Ⅹ 50 (Z)mm
|
| Maximum sample weight |
10kg |
| Scale |
He-Ne Frequency stabilized Laser |
| Measurement force |
Top surface measurement : 0.15 to 0.3mN(15 to 30mgf)
Side surface measurement : within 1.0mN(with 100mgf)
|
| Max measurement angle |
Top surface measurement 75° |
Side surface measurement :
When horizontal scanning 45 to 90°
When vertical scanning 80 to 90°
Angle is defined from horizontal surface.
|
| Probe measurement accuracy |
Top surface measurement(Sample : Standard sphere)
Z measurement range within 35mm
Up to 30° ±0.05 ㎛
Up to 45° ±0.08 ㎛
Up to 60° ±0.15 ㎛
Up to 70° ±0.15 ㎛(downward)
|
Side surface measurement (Sample : Standard sphere)
Equator roundness : ±0.15㎛
|
Combination of Top and Side surfaces measurement
Standard sphere measurement : within ±0.5 ㎛
|
| Measurement speed |
Top surface measurement : 0.01 to 10 ㎜/s
Side surface measurement : 0.01 to 5 ㎜/s
|
| Software |
Top surface measurement(UA3P) function
Measurement NC program automatic creation, Auto-alignment(Includes probe
radius offset), Data editing, Auto-centering, Monitoring while measuring,
3D color graph, Measurement origin operation, Point array data output
|
Side surface measurement(UA3P-L400S) function
Profile evaluation function for roundness, sphericity flatness and cylinder
|
Top and Side surfaces measurement function
Evaluation function for measurement based on lens outer shape
|
